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iCADA GmbH a Tec-Sem Group company IT Solution Provider
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NEWS ARCHIVE

May 2004:

  • New RSM version 3.5 released:

    Lots of new features and enhancements have been realized:

    • Improved web wizards for modeling fab specific procedures, e.g. reticle entry, blow off, etc.
    • Hierarchical grouping of reticle locations, hierarchical administration of users and user groups, etc.
    • Multi language support per user, e.g. English, French, Chinese, Japanese, Korean, etc.
    (Details).
  • Mask Vendor Connectivity (MaVen) now in production

    The RSM mask house interface provides for data exchange with mask suppliers using the SEMI standard P10. Reticle records in the RSM database are automatically created when the reticle order file is send to the mask-house. The progress of the manufacturing process in the mask house, e.g. production status, estimated time of arrival (ETA), etc. can be monitored with the RSM. Upon delivery of the reticle the electronic Certificate of Conformance (CofC) is automatically validated and verified with the original reticle order file. The RSM then supports the corresponding authority to sign-off the new reticle for production use in the fab. (Details).

March 2004:

Februray 2004:

October 2003:

  • iCADA names AceTeam its exclusive distributor in Taiwan. AceTeam is a young and fast expanding agent company based next to the famous Science Industrial Park in Hsinchu Taiwan (Taiwan's silicon valley). The experienced team members will work closely with the Taiwanese customers to sell and support iCADA's Reticle Management solutions.

July 2003:

  • iCADA and KLA Tencor have signed an agreement licensing iCADA for the implementation and use of the KLA Result Format (KLARF) in their software.

    The KLARF exchange option enables iCADA's reticle management system RSM to directly access to KLA's reticle inspection results. Previous RSM versions had to provide various, customer specific PostScript parsers for this purpose.

June 2003:

  • New RSM version 3.3 released:

    Lots of new features and enhancements have been realized:
    now supporting SUN Solaris, improved state model support, waiver tracking, improved trigger mechanism, DMS stocker integration, reticle selector export function, high availability, Web wizard, mouse wheel support, improved reticle selector loading/filtering time, etc.
    (Details).
  • Visit us at SEMICON West 2003.

May 2003:

  • iCADA now distributes the Dr. Schenk particle detection system
    Reticle Inspection System: Pollux.

    Pollux is a very fast and cost effective reticle surface inspection system which can be used as OEM for equipments as well as stand-alone system. It is well integrated with the iCADA Reticle Inspection Management (RIM). (Pollux Details).

March 2003:

  • iCADA proudly announces a new product for advanced reticle inspection analysis reducing production loss and rework:

    New product: GO / NO-GO Box

    The iCADA GO / NO-GO Box performs an in-depth analysis of reticle surface inspections and recognizes defect patterns such as scratches and torn pellicles prior to exposure (Details).

  • Visit us at SEMICON Europa 2003.

February 2003:

  • iCADA and Texas Instruments Inc. publish a case study about their Reticle Management System (Details).

  • Visit us at SEMICON China 2003.

December 2002:

  • iCADA wins against competitors and finalizes major deal with a European customer (Details).

  • iCADA receives the Editors' Choice Best Product Award for its Reticle Management Software (Details).

  • Visit us at the European Mask Conference 13th Jan - 15th Jan 2003 in Sonthofen, Germany (Details)

October 2002:

  • iCADA names Aneric its exclusive distributor in major Asian countries (Details).

September 2002:

  • iCADA provides a new world-time service for their international customers and partners.

August 2002:

  • iCADA supports the East German flood victims (Details).

July 2002:

Further RSM improvements:

  • SEMI E-109 compliant (98%).
  • Further enhancements to our photo dispatch connectivity .
  • Several new features bringing carrier and transponder management even further beyond SEMI E99.

June 2002:

  • Reticle Management now supports EAPSM masks.

May 2002:

  • First Mediation Device sold to the U.S.
  • Further integrations of new KLA-Starlight Models (KLA TerraStar, KLA Ligthning, etc.) and NIKON PPD inspection systems (see RIM).

March 2002:

January 2002:

Further RSM improvements:

  • Enhanced inspection support for improved preventive maintenance.
    (defect classification, delta maps, overlay maps,...)
  • 3D PDS Map now available via RSM Web.

December 2001:

August 2001:

  • RSM now optimized for AMHS & Transport Conveyors.
  • 300 mm ready.

July 2001:

New RSM improvements:

  • SEMI E-109 (prelimanary) compliant.
  • Carrier & Transponder Management
    (including Carrier Content Recognition on Multi-SMIF batches).
  • Reticle Tunneling Optimization in multi slot carriers.

June 2001:

Back to our news overview.

 

 


 

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