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PRODUCTS » Enviro Tracker
Mobile ESD Recorder for Semiconductor Process
EnviroTracker™, placed in a reticle carrier, travels along with the reticle throughout the entire process anywhere in the fab and collects the data on the reticle ESD exposure. At any time the collected data can be read via RFID link and the exposure status of the reticle will be known. If a reticle has been exposed to ESD, this reticle can be rerouted to inspection rather than to be a cause of defects in the ICs. Using collected data the locations of ESD exposure can be identified for correcting ESD environment problems and improving yield.
Key Advantages
- Miniature
EnviroTracker™ is designed for portability and can fit into most reticle carriers, SMIF pods and FOUPs. Customized versions can be manufactured. - Comprehensive Data
EnviroTracker™ for reticles collects data on both electrostatic voltage and ESD Events (discharges). Each incident is recorded with time stamp that allows precise tracking of location of ESD exposure for closed-loop corrective actions. - Easy Data Retrieval
EnviroTracker™ communicates its data via RFID interface allowing for non-contact data retrieval without interruption in the process. - Adjustable Parameters
EnviroTracker™ can be configured for different ESD levels depending on sensitivity of your reticle or other products. Configuration is done via RFID link by the software.
Applications
- Front-End Semiconductors
- Photolithography Equipment
- SMIF Pods
- FOUPs
- Reticle Carriers
- Electronics Assemblies
- Wherever ESD is of importance
Features
- Miniature
- Wide range of parameters
- Non-contact RFID interface
- Data collection with time stamp
- Integration in the process using
- factory-wide software
The EnviroTracker is a trademark of our partner company:
Credence Technologies, Inc.Please contact us for further details.
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