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PRODUCTS » Reticle Storage Manager (RSM)
The iCADA Reticle Management System administers an unlimited number of reticles, stockers and racks, while guaranteeing at the same time fast reticle access and tracking information.
Thanks to recommendations of our satisfied customers we won the Best Product Award 2002.
Key Benefits
- Reduce misproduction
by avoiding reticle handling errors.
The RSM eliminates misprocessing by tracking the exact reticle location of all reticles at any time. Human errors are avoided by the automatic retrieval or preselection of reticles by the CIM system. - Reduce misproduction
caused by damaged or unclean reticles.
The RSM manages cleaning and inspection cycles for each reticle using customer specific rules. The Automatic invocation of reticle inspections and remote notification for contaminated reticles ensure that only inspected and clean reticles go to production and results in improved yields. - Maximize equipment efficiency.
The RSM reduces the stepper wait time by eliminating delays when searching for reticles. The automatic storage and retrieval features guarantee a just-in-time availability of the reticles. The RSM takes advantage of the stocker idle time by invoking automatic inspection of reticles triggered by customer specific rules.
Key Features
- Tracking of reticle status, movements, usage, inspection and repair history for the entire reticle life-cycle.
- Local and remote location and retrieval of reticles via convenient wildcard filtering (Reticle-ID, Bar-code, Status, Location, ...).
- Grouping of reticles (e.g. by mask sets).
- Support of all combinations of stockers and racks.
- Integration into your CIM system.
- Pre-selection of reticles for retrieval. Visualization of pending retrieve requests in a sortable & searchable material request queue.
- Automatic inspection and cleaning cycles.
- Reticle usage and inspection monitor.
- Local and remote particle viewer (e.g. in Maskshop)
- Bar code scanner and (label) printer support.
- Handheld interface for reticle search and check lists.
- ARHS support
- SEMI E-109 compliant
- Carrier & Transponder Management
(including Carrier Content Recognition) - Multi-Pod Tunneling Optimization
Stocker Features
In combination with a reticle stocker:
- Automatic insertion and retrieval of reticles.
- Direct reticle transfer between load ports
- Stocker status monitoring, trend reporting and remote alarm.
In combination with a reticle stocker and an integrated particle detection system:
- Automatic inspection of reticles during stocker-idle-time triggered by customer specific inspection rules
- Automatic alarms for contaminated reticles exceeding a configurable limit.
New RSM Features Version 3.3 (June 2003).
New RSM Features Version 3.5 (June 2004).
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