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PRODUCTS » Reticle Inspection Manager (RIM)
Reticle Inspection Management (RIM)system for storage and visualization of reticle inspection data from various inspection tools.
Benefits
- Reduce Misproduction
caused by damaged or contaminated reticles.
The RIM manages cleaning and inspection cycles for each reticle using customer specific rules. Automatic locking of contaminated reticles and remote notification of the responsible operator/engineer ensure that only inspected and clean reticles go to production which results in improved yields. - Improve Quality Control.
The RIM manages and stores the reticle inspection data for the entire reticle life-cycle and provides for advanced (history) reporting through a fab-wide web interface. Find contaminated reticles at one gaze using the highly configurable "Smart Contamination Value". Spot new relevant defects at one gaze by removing known "DONT-CARE"defects. - Increase Automation.
The RIM provides for automatic inspection and re-qualification triggering. Upload and download of parameter files and results can be automated to avoid human errors.
Features
Visualization:
- Graphical visualization, selection and filtering of particles/defects by size or class.
- Visualization of all individual reticle faces and/or a combined "exposure view".
- Multiple renderers satisfying user-specific needs.
- 3D inspection result visualization (VRML, DXF, ...):
2D/ 3D transitions based on 2D grey map conversion including meshing & reduction of faces. - Delta maps:
Compare multiple inspections, subtract a reference map, spot new particles/ defects at one gaze, ... - Overlay maps:
Join inspection results (eg. of an entire mask set), see impact of particles and defects on the exposure, ... - Defect classification & user annotations:
critical, stationary, transparent, opaque, false, ... - User definable defect / contamination severeness areas.
- Smart contamination value:
Find the dirtiest reticles at one gaze. - Visualization and archiving of inspection data. Visualization of multiple PDS Maps for a efficient contamination cause tracking.
- Delta Maps for tracing stationary defects and contaminating processes.
Integration:
- Seamless integration into your CIM (fab automation)system.
- Integration of most reticle inspection systems (KLA, NIKON, Zaris,...)
Tracking & Storage:
- Tracking of reticle inspection cycles.
- Inspection and repair history for the entire reticle life-cycle.
- User annoations and remarks for all inspections
- Printer support for analog archiving of all available information.
- Graphical particle data export (RFF, ESF, etc.).
- Remote access to the entire inspection data archive from the Fab intranet via RSM/WEB.
Automation:
- Manual and automatic inspection queueing on # of I/O cycles, manual movements, lot counts, CIM status changes or/and based on a configurable, scheduled basis.
- Automatic alarm when a contamination limit is exceeded. (optional remote alarm with the Mediation Device)
- Inspection System support in Reticle Stockers: Automatic inspection triggering during idle time of stocker.
- Upload and download of parameter files and results.
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